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Thin glass micro-dome structure based microlens fabricated by accurate thermal expansion of microcavities
http://hdl.handle.net/10061/14035
http://hdl.handle.net/10061/1403575633723-0293-4af3-8f31-33158fe23e03
| アイテムタイプ | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2020-08-27 | |||||
| タイトル | ||||||
| タイトル | Thin glass micro-dome structure based microlens fabricated by accurate thermal expansion of microcavities | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | open access | |||||
| 著者 |
Aishan, Yusufu
× Aishan, Yusufu× Yalikun, Yaxiaer× Amaya, Satoshi× Shen, Yigang× Tanaka, Yo |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We present an efficient fabrication technique for a glass microdome structure (GMDS) based on the microthermal expansion principle, by inflating the microcavities confined between two thin glass slides. This technique allows controlling the height, diameter, and shape of the GMDS with a uniformity under 5%. The GMDS has a high potential for the application of the microlens and lens array. This inflated hollow, thin glass structure is stable at extreme environments such as in strong acid and high temperature conditions. More importantly, the hollow microdome can be filled with liquid substances to further extend its applications. To verify our method, various GMDSs were fabricated under different process conditions, at different temperatures (540?°C?600?°C), microcavity diameters (300?μm?600?μm), glass thicknesses (120?μm?240?μm), and microcavity etching depths (25?μm?70?μm). The optical features of “empty” and “filled” microcavities were investigated. An empty microcavity functioned as a reducing lens (0.61×?0.9×) (meniscus lens), while a filled microcavity functioned as a magnifying lens (1.31×?1.65×) (biconvex lens). In addition, both lenses worked in strong acid (sulfuric acid) and high temperature (over 300?°C) conditions in which other materials of lenses cannot be used. | |||||
| 書誌情報 |
en : Applied Physics Letters 巻 115, 号 26, 発行日 2019-12-26 |
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| 出版者 | ||||||
| 出版者 | American Institute of Physics | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 1077-3118 | |||||
| 出版者版DOI | ||||||
| 関連タイプ | isReplacedBy | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1063/1.5123186 | |||||
| 出版者版URI | ||||||
| 関連タイプ | isReplacedBy | |||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://aip.scitation.org/doi/10.1063/1.5123186 | |||||
| 権利 | ||||||
| 権利情報 | Published under license by AIP Publishing. | |||||
| 著者版フラグ | ||||||
| 出版タイプ | NA | |||||
