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Effect of Average Grain Size on the Uniformity and Ferroelectricity of BTO/PSX Thin Films Processed by Low-Temperature Solution Method
http://hdl.handle.net/10061/0002000779
http://hdl.handle.net/10061/0002000779b3aa3322-0485-4971-b62e-f1ba96028384
| アイテムタイプ | 学術雑誌論文 / Journal Article(1) | |||||||||||
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| 公開日 | 2025-02-17 | |||||||||||
| タイトル | ||||||||||||
| タイトル | Effect of Average Grain Size on the Uniformity and Ferroelectricity of BTO/PSX Thin Films Processed by Low-Temperature Solution Method | |||||||||||
| 言語 | ||||||||||||
| 言語 | eng | |||||||||||
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| 主題Scheme | Other | |||||||||||
| 主題 | Circuits | |||||||||||
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| 主題Scheme | Other | |||||||||||
| 主題 | Layers | |||||||||||
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| 主題Scheme | Other | |||||||||||
| 主題 | Nanoparticles | |||||||||||
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| 主題Scheme | Other | |||||||||||
| 主題 | Polarization | |||||||||||
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| 主題Scheme | Other | |||||||||||
| 主題 | Transistors | |||||||||||
| 資源タイプ | ||||||||||||
| 資源タイプ | journal article | |||||||||||
| アクセス権 | ||||||||||||
| アクセス権 | open access | |||||||||||
| 著者 |
Wu, Chuanjun
× Wu, Chuanjun
× Bermundo, Juan Paolo× Safaruddin, Aimi Syairah
× Yamamoto, Atsuko
× 浦岡, 行治 |
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| 抄録 | ||||||||||||
| 内容記述タイプ | Abstract | |||||||||||
| 内容記述 | In this study, we utilized 50 nm BaTiO3 (BTO) nanoparticles and polysiloxane (PSX) with a higher concentration of methyl and silica groups to fabricate insulating layers at a low curing temperature of 100 °C using a solution-based method. This approach aims to enhance film uniformity while retaining the ferroelectric properties. Consequently, we maintained a minimal leakage current in thin-film transistors (TFTs) while achieving transfer characteristics characterized by a distinct hysteresis. Moreover, we verified the presence of ferroelectricity in 50 nm BTO nanoparticles. Compared with prior research, we confirm that decreasing nanoparticle size effectively reduces film roughness but also leads to a reduction in polarization intensity due to smaller diameter BTO nanoparticles. Additionally, a higher proportion of methyl and silica groups effectively lowers the curing temperature of PSX. At the same time, the hydrogen ions released in the polycondensation reaction can also effectively suppress the oxygen vacancies at the interface between dielectric and channel layers, improving the TFT electrical characteristics. | |||||||||||
| 書誌情報 |
en : ACS Omega 巻 9, 号 32, p. 34735-34742, 発行日 2024-08-13 |
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| 出版者 | ||||||||||||
| 出版者 | American Chemical Society | |||||||||||
| ISSN | ||||||||||||
| 収録物識別子タイプ | EISSN | |||||||||||
| 収録物識別子 | 2470-1343 | |||||||||||
| 出版者版DOI | ||||||||||||
| 関連タイプ | isReplacedBy | |||||||||||
| 識別子タイプ | DOI | |||||||||||
| 関連識別子 | https://doi.org/10.1021/acsomega.4c03922 | |||||||||||
| 出版者版URI | ||||||||||||
| 関連タイプ | isReplacedBy | |||||||||||
| 識別子タイプ | URI | |||||||||||
| 関連識別子 | https://testpubschina.acs.org/doi/10.1021/acsomega.4c03922 | |||||||||||
| 権利 | ||||||||||||
| 権利情報Resource | https://creativecommons.org/licenses/by-nc-nd/4.0/ | |||||||||||
| 権利情報 | $00A9 2024 The Authors. Published by American Chemical Society. This publication is licensed under CC-BY-NC-ND 4.0 . | |||||||||||
| 著者版フラグ | ||||||||||||
| 出版タイプ | NA | |||||||||||
