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Improvement of on-pixel polarizer with 0.35 μm CMOS process for electro-optic imaging systems
http://hdl.handle.net/10061/0002000523
http://hdl.handle.net/10061/0002000523324ca9a6-aa9b-4c42-9cd8-e804d8bf54d5
| アイテムタイプ | 学術雑誌論文 / Journal Article(1) | |||||||||||
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| 公開日 | 2024-08-29 | |||||||||||
| タイトル | ||||||||||||
| タイトル | Improvement of on-pixel polarizer with 0.35 μm CMOS process for electro-optic imaging systems | |||||||||||
| 言語 | ||||||||||||
| 言語 | eng | |||||||||||
| 資源タイプ | ||||||||||||
| 資源タイプ | journal article | |||||||||||
| アクセス権 | ||||||||||||
| アクセス権 | open access | |||||||||||
| 著者 |
Okada, Ryoma
× Okada, Ryoma
× 笹川, 清隆× Mizuno, Maya
× Takehara, Hironari
× 春田, 牧人× 田代, 洋行× 太田, 淳 |
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| 抄録 | ||||||||||||
| 内容記述タイプ | Abstract | |||||||||||
| 内容記述 | In this paper, we propose an improved on-pixel polarizer structure for an image sensor, which was fabricated using the 0.35 μm standard CMOS process with dual metal layers (Metal 1 and Metal 2), i.e. two layers of gratings with metal-wiring layers were stacked. By designing the line/space ratio as 0.7/0.7 μm, the extinction ratio was significantly improved at a wavelength of 780 nm, which was over 1.4 times higher than that of a single-layer grating, and the detection sensitivity of the polarization change was enhanced by more than 1.8 times. We also demonstrated electro-optical imaging at radio frequency using this image sensor. | |||||||||||
| 書誌情報 |
en : Japanese Journal of Applied Physics 巻 62, 発行日 2023-02-06 |
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| 出版者 | ||||||||||||
| 出版者 | IOP Publishing | |||||||||||
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| 収録物識別子タイプ | EISSN | |||||||||||
| 収録物識別子 | 1347-4065 | |||||||||||
| 出版者版DOI | ||||||||||||
| 関連タイプ | isReplacedBy | |||||||||||
| 識別子タイプ | DOI | |||||||||||
| 関連識別子 | https://doi.org/10.35848/1347-4065/acb0da | |||||||||||
| 出版者版URI | ||||||||||||
| 関連タイプ | isReplacedBy | |||||||||||
| 識別子タイプ | URI | |||||||||||
| 関連識別子 | https://iopscience.iop.org/article/10.35848/1347-4065/acb0da | |||||||||||
| 権利 | ||||||||||||
| 権利情報Resource | http://creativecommons.org/licenses/by/4.0 | |||||||||||
| 権利情報 | $00A9 2023 The Author(s). Content from this work may be used under the terms of the Creative Commons Attribution 4.0 license. | |||||||||||
| 著者版フラグ | ||||||||||||
| 出版タイプ | NA | |||||||||||
